1. Technical characteristics - very suitable for factories (high efficiency, operation fool type, fully automatic) and university teaching and scientific research (reliable

Good performance, easy to demonstrate)

It adopts automatic leveling, with four functions: vacuum contact exposure, hard contact exposure, pressure contact exposure and proximity exposure, and automatically separates and aligns the gap and eliminates

Exposure gap, using 350W imported (Germany) DC mercury lamp, can adjust the energy density of light. The appearance of the equipment is beautiful and refined, the performance is very reliable, and the automation process

The degree is very high, and the operation is very convenient.

2. Technical parameters

• Exposure area: 6 inches
• Exposure wavelength: 365nm
• Resolution: 1-1.2 μm (  2 μm  thick).
• Alignment accuracy: ±0.8μm
• Overall motion range of the mask: X: 15mm; Y:15mm
• Mask sizes: 3 inches, 4 inches, 5 inches, 7 inches
• Sample size: diameter Φ15mm-- Φ150mm (all kinds of irregular pieces); Thickness 0.1mm--6mm
• Exposure method: timed (countdown mode) and fixed dose
• It has four functions: vacuum contact exposure, hard contact exposure, pressure contact exposure, and proximity exposure
• Illumination non-uniformity: 6% (Φ150mm range).
• Binocular dual-field alignment microscope: both visual alignment through eyepieces, or alignment through CCD+ display, optical synthesis, optical maximum magnification of 400 times, optical + electronic magnification of 800 times; Three pairs of objective lenses: 4x, 10x, 20x; Three pairs of eyepieces: 10x, 16x, 20x
• Leveling the contact pressure is guaranteed to be repeatable by means of a sensor
• Digitally set alignment gap and exposure gap
• It has an interface to the imprint module and also has an interface to the proximity module
• Mask relative to sample movement: X: ±5mm; Y: ±5mm; θ: ±6º
• Maximum focal thickness: 350 μm (SU8 gel, user-provided detection conditions).
• Light source parallelism: 3.5 º
• Exposure energy density: >15mW/cm2, illumination surface temperature <35 º
• Single-layer exposure is done with one click
• Ball air float automatic leveling is adopted
• Mercury lamp power: 350W (DC, inlet).

3. Dimensions: 1200mm (length)  900mm (width)  1750mm (height).

4. Configuration

(1) Exposure head

• Cold-light ellipsoids
• 350W imported DC high-voltage mercury lamp (Osram, Germany).
• XYZ Mercury Lamp Adjustment Table
• Cooling fan
• Optical system: fixed light bar, variable light bar, shutter, collimating mirror 1, collimating mirror 2, fly eye lens group (79 lenses), I-line filter, field mirror, cold light mirror 1, reflector 2

(2) Align the workpiece table

• Mask the overall sports table
• The mask is relative to the motion table
• Turntable
• Sample leveling mechanism, three-point automatic completion
• Sample focusing mechanism, motor automatic adjustment
• Substrate pull-out upper and lower mechanism
• 4 film decks: Φ15mm, 3 inches, 4 inches, 6 inches (can be increased or decreased according to user requirements).
• 4 mask clamps: 3 inches, 4 inches, 5 inches, 7 inches (can be increased or decreased according to user requirements).

(3) Align the microscope

• Light source (2 equipment), power supply
• Binocular bin-field alignment with the microscope body
• 3 pairs of eyepieces (10x, 16x, 20x, 6 in total).
• 3 pairs of objective lenses (4x, 10x, 20x, 6 in total).
• CCD alignment system, 21" LCD

(4) Electronic control system

• Mercury lamp trigger power supply (350W DC mercury lamp).
• MCU control system
• Control cabinet table

(5) Pneumatic system

• Cylinders, solenoid valves, pressure reducing valves, pneumatic switches, etc
• Solenoid valve actuated
• Pneumatic instrumentation

(6) Other attachments

• One vacuum pump
• One air compressor
• pipeline

(7) Technical data

• Use the service manual
• Microscope instruction manual

5. Delivery: 1 month

6. Quotation: about 260,000 RMB, confirmed or adjusted according to the configuration