The main technical indicators of the film thickness meter

Measuring range: 50 nm-1000 μm

Measurement repeatability*1 (RMS): 0.086 nm

Measurement absolute accuracy*2 (compared to ellipsometer): 0.25 nm=

Light source used: halogen lamp

Angle of incidence: 90°

Test Material: Transparent or translucent film material

Spot size: 20 μm-3 mm (optional).

Measurement time: 100 ms-4 ms

Communication interface: USB2.0

• 1: 316nm thickness standard sample test results

• 2: 316nm thickness standard sample test results

 

Technical features:

The measurement is carried out by the principle of spectral interferometry, which has the characteristics of non-contact, non-destructive and fast;

 Can be used in a vacuum environment;

 It can be matched with a large-stroke workpiece table to realize automatic measurement of large-area film thickness.