URE-2000/30 (Customized) Ultraviolet Lithography Machine Product Specifications

 

1. Technical parameters

• Exposure area: 4 inches
• Exposure wavelength 1: 365nm or 405nm (switchable, filter changeable),
• Exposure wavelength 2: 248nm
• Exposure position 1 and exposure position 2 are automatically switched
• Resolution: 0.8-1μm
• Mask size: 2.5 inches, 3 inches, 4 inches, 5 inches (standard configuration, other sizes can be customized)
• Sample size: diameter Φ10mm--Φ100mm or 15mm×15mm-100mm×100mm (standard configuration, other sizes can be customized), the thickness can be adapted to 0.1mm--5mm (the maximum can be expanded to 15mm)
• Exposure method: Timed (countdown mode)
• It has four functions: vacuum contact exposure, hard contact exposure, pressure contact exposure, and proximity exposure
• Illumination non-uniformity: 3% (Φ100mm range).
• Leveling the contact pressure is guaranteed to be repeatable by means of a sensor
• Digitally set alignment gap and exposure gap
• Mask relative to sample stroke: X: better than ±5mm; Y: Better than ±5mm;  Thetata: better than ±6º
• Maximum coke thickness: 400μm (SU8 glue, user-provided testing conditions).
• Light source parallelism: <3º
• Exposure energy density 1: >20mW/cm² (365 or 405 nm), illumination surface temperature < 35º
• Exposure energy density 2: >3mW/cm² (248nm).
• Single-layer exposure is done with one click
• Ball air float automatic leveling is adopted
• Mercury lamp power: 350W (DC, imported mercury lamp)

2. Dimensions: about 1400mm (length), × 900mm (width) × 1800mm (height).

 

3. Configuration

The equipment is mainly composed of uniform illumination exposure system, workpiece table system, electronic control system, pneumatic control system and auxiliary equipment.

 

serial number	Subsystems/components	Configuration/Specifications
1	Light source system 1 （365nm、405nm）	Cold-light ellipsoids 350W imported DC high voltage mercury lamp (imported) XYZ mercury lamp adjustment table Cooling fan Optical system: fixed light bar, variable light bar, shutter, collimating mirror mirror 1, collimating mirror mirror 2, fly's eye lens group (79 lenses), filter, field mirror 1, cold light reflector 1, reflector 2
2	Light source system 2 （248nm）	Cold-light ellipsoids 350W imported DC high voltage mercury lamp (imported) XYZ mercury lamp adjustment table Cooling fan Optical system: shutter, collimating mirror 1, collimating mirror 2, fly eye lens group, field lens 1, cold light mirror 1, reflector 2
3	Align the workpiece table	The mask is relative to the motion table Turntable Sample leveling mechanism, automatic Substrate pull-out upper and lower mechanism Sample focusing mechanism, motor automatic adjustment 4 substrate tables: Φ15mm, 2 inches, 3 inches, 4 inches 4 mask clamps: 2.5 inches, 3 inches, 4 inches, 5 inches
4	Electronic control system	Mercury lamp trigger power supply (350W DC mercury lamp) 2 sets Control system Control cabinet table
5	Pneumatic system	Cylinders, solenoid valves, pressure reducing valves, pneumatic switches, etc Solenoid valve actuated Pneumatic instrumentation
6	Other accessories	One vacuum pump (oil-free pump) One air compressor (silent pump) pipeline
7	Technical information	Instruction manual for use, certificate of conformity