1. Technical parameters

• Exposure area: 100mmX100mm
• Exposure wavelength: 365nm
• Resolution: 0.8 μm (2 μm thick).
• Alignment accuracy: ±0.6μm
• Overall motion range of the mask: X: 15mm; Y:15mm
• Mask sizes: 2.5", 3", 4", 5".
• Sample size: diameter Φ15mm-Φ100mm (all kinds of irregular pieces); Thickness 0.1mm--6mm (expandable to 15mm).
• Exposure method: timed (countdown mode) and fixed dose
• It has four functions: vacuum contact exposure, hard contact exposure, pressure contact exposure, and proximity exposure
• Illumination non-uniformity: 2.5% (Φ100mm range).
• Binocular dual-field alignment microscope: both visual alignment through eyepieces, or alignment through CCD+ display, optical synthesis, optical maximum magnification of 400 times, optical + electronic magnification of 800 times; 3 pairs of objective lenses: 4x, 10x, 20x; 3 pairs of eyepieces: 10x, 16x, 20x
• Leveling the contact pressure is guaranteed to be repeatable by means of a sensor
• Digitally set alignment gap and exposure gap
• It has an interface to the imprint module and also has an interface to the proximity module
• Mask Relative to Sample Travel: X: ±5mm; Y: ±5mm; Thema: ±6 degrees
• Maximum Focal Thickness: 600 μm (SU8 gel, user-provided detection conditions).
• Light source parallelism: 1.2º
• Exposure energy density: >20mW/cm2
• Mercury lamp power: 1000W (DC, import).

2. Dimensions: 1400mm (length), × 1200mm (width) × 1950mm (height).

3. Configuration

(1) Exposure head

• Cold-light ellipsoids
• XYZ Mercury Lamp Adjustment Table
• Cooling fan
• 1000W imported DC high voltage mercury lamp (Osram, Germany).
• Optical system: fixed light bar, variable light bar, shutter, collimating mirror 1, collimating mirror 2, fly's eye lens set (109 lenses), I-line filter, field mirror, cold light mirror 1, reflector 2

(2) Align the workpiece table

• Mask the overall sports table
• The mask is relative to the motion table
• Turntable
• Sample leveling mechanism, automatic
• Sample autofocus mechanism
• 4 substrate tables (Φ15mm, 2 inches, 3 inches, 4 inches).
• 4 mask clamps (2.5", 3", 4", 5".
• Substrate pull-out upper and lower mechanism

(3) Alignment microscope and CCD alignment system

• Light source, power supply
• Binocular bin-field alignment with the microscope body
• 3 pairs of eyepieces (10x, 16x, 20x, 6 in total).
• 3 pairs of objective lenses (4x, 10x, 20x, 6 in total).
• CCD
• 21-inch LCD monitor

(4) Electronic control system

• Mercury lamp trigger power supply (1000W DC mercury lamp).
• MCU control system
• Control cabinet table

(5) Pneumatic system

• Cylinders, solenoid valves, pressure reducing valves, pneumatic switches, etc
• Solenoid valve actuated
• Pneumatics

(6) Other attachments

• One vacuum pump (oil-free pump)
• One air compressor (silent pump)
• pipeline

(7) Technical data

• Use the service manual.
• Microscope instruction manual

4. Delivery time: 2 months

5. Quotation: about 390,000 RMB, confirmed or adjusted according to the configuration