1. Equipment name: URE-2000/35AL lithography machine

2. Equipment manufacturer: Institute of Optoelectronic Technology, Chinese Academy of Sciences

3. Main technical parameters:

(1) Exposure area: 150mm×150mm;

(2) Illumination non-uniformity: ≤4% (Φ150mm range);

(3) Resolution: 1.0m (365nm wavelength).

(4) Alignment accuracy: ≤±0.8μm;

(5) Mask size: 2.5 inches, 3 inches, 4 inches, 5 inches, 7 inches;

(6) Sample size: diameter Φ15mm-Φ150mm, thickness 0.1mm--6mm;

(7) Mask relative to sample movement stroke: X: ±5mm; Y: ±5mm; θ:±6°；

(8) The overall motion range of the mask pattern: X: 6mm; Y:6mm

(9) Exposure light source: ultraviolet LED (imported);

(10) Exposure wavelength: 365nm;

(11) Exposure intensity: ≥15mW/cm2;

(12) Exposure timing: countdown mode (0.1s-9999.9s arbitrarily set).

(13) Leveling the contact pressure is guaranteed to be repeated through the sensor

(14) Digitally set the alignment gap and exposure gap

(15) It has an imprint module interface, and also has a proximity module interface

Fourth, technical composition and configuration

The equipment is composed of exposure head system, alignment workpiece table system, CCD alignment microscope system, electronic control system, pneumatic system and other parts.

(1) The exposure head system includes:

◆ Imported ultraviolet LED light source module;

◆ LED light source shaping module;

◆ XYZ light source position adjustment table;

◆ Optical system (including shaping module, variable light bar, electronic shutter, fly's eye lens group (79 lenses), field lens group, and mirror group);

◆ Cooling fan.

(2) The alignment workpiece table system comprises:

◆ Mask Relative Motion Table (XY);

◆ Turning table;

◆ Sample leveling mechanism, using three-claw plus ball air flotation automatic leveling mode;

◆ Sample focusing mechanism, using motor and sensor, can digitally separate the exposure gap;

◆ 4 film bearing tables (1 each for 2 inches, 3 inches, 4 inches, and 6 inches);

◆ 4 mask clamps (1 each for 3 inches, 4 inches, 5 inches, and 7 inches).

(3) The CCD alignment microscope system comprises:

◆ Align the light source with LED light;

◆ Binocular and dual-field alignment of the microscope body;

◆ 3 pairs of eyepieces (10x, 16x, 20x, 6 in total);

◆ 3 pairs of objective lenses (4x, 10x, 20x, 6 in total);

◆ CCD parts;

◆ 22 inch widescreen LCD monitor.

(4) The electronic control system includes:

◆ MCU control system;

◆ Ultraviolet LED power module;

◆ Control cabinet table.

(5) The pneumatic system includes:

◆ Cylinders, solenoid valves, pressure reducing valves, pneumatic switches, solenoid valve drives, pneumatic instruments, etc.

(6). Auxiliary equipment configuration:

◆ 1 vacuum pump (dry pump);

◆ 1 silent air compressor;

◆ Supporting pipe 10m;

(7). Spare parts

◆ 4 alignment light sources (LED-1W, excluding the two that come with the machine);

5. Price: about 280,000 RMB, confirmed or adjusted according to the configuration

6. The delivery time is within 1 month (including on-site installation and commissioning), and the warranty period is 1 year.