1. Main technical parameters

• Exposure area: 6 inches
• Exposure wavelength: 365nm: 20mW/cm²; 405nm：20-35mW/cm²
• Resolution: 1 μm
• Alignment accuracy: ±2 μm (double-sided, sheet thickness 0.8 mm), ± 0.8 μm (single-sided).
• Mask sizes: 3", 4", 5", 7".
• Sample sizes: 2", 3", 4", 6"; Thickness 0.1mm-6mm
• Exposure method: timed (countdown mode) and fixed dose
• Leveling the contact pressure is guaranteed to be repeatable by means of a sensor
• Digitally set alignment gap and exposure gap
• It has an interface to the imprint module and also has an interface to the proximity module
• The front alignment adopts binocular dual-field alignment microscope: it can be visually aligned through the eyepiece, or it can be aligned by CCD+ display, optical synthesis, the maximum optical magnification is 400 times, and the optical + electronic magnification is 800 times; Three pairs of objective lenses: 4x, 10x, 20x; Three pairs of eyepieces: 10x, 16x, 20x
• Bottom surface alignment: double microscope objective lens + CCD + acquisition card + computer combining, objective lens wheelbase range 10mm-148mm
• Illumination non-uniformity: 2.5% (Φ100mm range); 3% (Φ150mm range).
• Mask relative to sample movement: X: ±5mm; Y：±5mm; Thetata: ±6 degrees
• Maximum gel thickness: 500 μm (SU8 gel, user-provided detection conditions).
• Light source parallelism: 2°
• It has a circulating water cooling system
• Mercury lamp power: 1000W (DC, import).

2. Dimensions: 1400mm (length), × 1200mm (width) ×2000mm (height).

3. Equipment composition and configuration details

The equipment is mainly composed of uniform illumination exposure system (exposure head), alignment workpiece table system, binocular dual-field microscope system, bottom CCD alignment system, electronic control system, pneumatic control system and auxiliary supporting equipment.

(1) The exposure head system includes:

• Cold-light ellipsoids
• 1000 W imported DC high-voltage mercury lamp (Osram, Germany).
• XYZ Mercury Lamp Adjustment Table
• Cooling fan
• Optical system: fixed light bar, variable light bar, shutter, collimating mirror 1, collimating mirror 2, fly's eye lens group (more than 109 lenses), I-line filter, field mirror, cold light mirror 1, reflector 2

(2) The alignment workpiece table system comprises:

• Mask Relative Motion Table (XY).
• Rotary table (θ)
• Automatic leveling mechanism for samples
• Sample focusing mechanism
• 4 film decks (2 inches, 3 inches, 4 inches, 6 inches).
• 4 mask bases (3 inches, 4 inches, 5 inches, 7 inches).
• Mask flipping and rotation mechanism

(3) Alignment microscope (optional with CCD type, eyepiece and monitor can be observed at the same time) The system includes:

• LED lighting and supporting power supply
• Binocular bin-field alignment with the microscope body
• 3 pairs of eyepieces (10x, 16x, 20x, 6 in total).
•  3 pairs of objective lenses (4x, 10x, 20x, 6 in total).
• CCD and optical imaging systems
• The XYZ underside aligns the workpiece table (two sets).

(4) Bottom CCD alignment system

• LED lighting and supporting power supply
• CCD & Optical Imaging System (2 sets).
• Data Acquisition Cards

(5) Electronic control system

• Mercury lamp trigger power supply (1000W DC mercury lamp).
• MCU control system
• Control cabinet table
• Computer system (22-inch widescreen LCD).

(6) Pneumatic system

• Cylinders, solenoid valves, pressure reducing valves, pneumatic switches, etc
• Solenoid valve actuated
• Pneumatic instrumentation

(7) Other accessories (optional).

• One vacuum pump (oil-free silent type)
• One air compressor (oil-free and silent type)
• Constant temperature circulating water cooling system
• pipeline

(8) Technical data

• Equipment use and maintenance manual

4. Delivery time: within 2 months after signing the contract.

5. Quotation: about 450,000 RMB, confirmed or adjusted according to the configuration