1. Technical parameters

• Exposure area: 6 inches
• Exposure wavelength: 365nm:
• Power density: >25mW/cm2
• Resolution: 1 μm
• Frontal binocular dual-field alignment microscope:
• It can be visually aligned through the eyepiece, or by CCD+ display, optical combining, the maximum optical magnification is 400 times, the optical + electronic magnification is 800 times, and the objective lens is three pairs: 4 times, 10 times, and 20 times; Eyepiece triple pairs: 4x, 10x, 20x
• Frontal vertical dual CCD alignment system, optical magnification, 0.65-4.5x; Side-facing light source
• Bottom surface alignment: double microscope objective lens + CCD + acquisition card + computer combining, objective lens wheelbase range 10mm-148mm
• Alignment accuracy: ±2 μm (double-sided, sheet thickness 0.8 mm), ± 0.8 μm (single-sided).
• Mask sizes: 3 inches, 4 inches, 5 inches, 7 inches
• Sample sizes: 2", 3", 4", 6"; Thickness: 0.1mm--2mm (double-sided).
• Exposure method: timed (countdown mode) and fixed dose
• Illumination non-uniformity: 2.5% (Φ100mm range); 4% (Φ150 mm range).
• Mask relative to sample movement: X: ±5mm; Y: ±5mm; Thema: ±6 degrees
• Mercury lamp power: 350W (DC, inlet).
• Leveling the contact pressure is guaranteed to be repeatable by means of a sensor
• Digitally set alignment gap and exposure gap
• It has an interface to the imprint module and also has an interface to the proximity module
• Maximum gel thickness: 350 μm (SU8 gel, user-provided detection conditions).
• Light source parallelism: 3.5°

2. Dimensions: 1300mm (length), × 900mm (width) × 1800mm (height).

3. Configuration

(1) Exposure head

• Cold-light ellipsoids
• 350 W imported DC high-voltage mercury lamp (Osram, Germany).
• XYZ Mercury Lamp Adjustment Table
• Cooling fan
• Optical system: fixed light bar, variable light bar, shutter, collimating mirror 1, collimating mirror 2, fly's eye lens group (79 lenses), I-line filter, field mirror 1, cold light reflector 1, reflector 2

(2) Align the workpiece table

• The mask is relative to the motion table
• Turntable
• Sample leveling mechanism, automatic
• Sample focusing mechanism, cylinder automatic adjustment
• 4 receptacles (2", 3", 4", 6".
• 4 mask clamps (3", 4", 5", 7".
• Mask pull-out upper and lower mechanism

(3) Binocular dual-field alignment microscope (with CCD, eyepiece and monitor for simultaneous observation).

• Light source, power supply
• Binocular bin-field alignment with the microscope body
• 3 pairs of eyepieces (10x, 16x, 20x, 6 in total).
•  3 pairs of objective lenses (4x, 10x, 20x, 6 in total).
• Vertical dual CCD optical alignment system
• Aim the light source sideways

(4) Bottom CCD alignment system

• Light source, power supply
• Imaging optics
• Data Acquisition Cards
• CCD

(5) Electronic control system

• Mercury lamp trigger power supply (350W DC mercury lamp).
• MCU control system
• Control cabinet table
• Computer system (21-inch widescreen LCD).

(6) Pneumatic system

• Cylinders, solenoid valves, pressure reducing valves, pneumatic switches, etc
• Solenoid valve actuated
• Pneumatic instrumentation

(7) Other attachments

• One vacuum pump (oil-free pump)
• One air compressor (sound and static pump)
• pipeline

(8) Technical data

• Use the service manual
• Microscope instruction manual

4. Lead time: 1-2 months

5. Quotation: about 400,000 RMB, confirmed or adjusted according to the configuration