1. Technical characteristics

• DMD is used as the digital mask, and the number of pixels is 1024×768 or 1920×1080 or 2560×1600
• Reduced projection lithography objective lens is used for imaging, and the resolution is 1um.
• Patented technology is used to achieve uniform clarity with a fly's eye lens that is misaligned with the building blocks.
• Imported precision grating, imported motor, imported guide rail, imported lead screw are used to achieve accurate workpiece positioning and exposure splicing, which can adapt to 100mm × 100mm substrates.
• The CCD focusing system is used to achieve full-field leveling, automatic field-by-field focusing, or automatic field-by-field focusing and exposure.
• It has an alignment function

2. Technical parameters

• Light source: 350W spherical mercury lamp (exposure line:  i-line) or UV LED;
• Illumination non-uniformity: 2%;
• Objective magnification: 7.6x (or 14x depending on the DMD pixel size chosen).
• Exposure field area: 1mm×0.7mm (or 1.9mm×1.8mm, or 2.5mm×1.6mm, depending on the number of DMD pixels selected).
• Lithography resolution: 1 μm
• Workpiece table motion range: X: 100mm, Y: 100mm; Workpiece table motion positioning accuracy: ±0.5μm;
• Focusing table motion sensitivity: 1μm;
• Alignment accuracy: ±2μm;
• Focus table travel stroke: 6mm
• Focusing: CCD detection with an accuracy of 2 microns
• Rotation table stroke: more than ±6°
• Write-through speed: 40mm2/min
• Substrate size: outer diameter:  Φ1mm-Φ100mm, thickness: 0.1mm--5mm

3. Dimensions: 840mm (length), × 450mm (width) × 830mm (height).

4. Configuration

(1) Lighting system

• 350W DC mercury lamp (or UV LED), ellipsoid, collimator, fly's eye lens set, field mirror set, 365nm  filter, pneumatic shutter, DMD (Texas Instruments), cooling fan.
• The projection objective lens is 7.6 times, and another one can be added according to user requirements
• Resolution: 1μm (7.6x reduction)

(2) Workpiece table system

• X-set : motor driver (Japan Lezi), lead screw (Japan NSK), guide rail 2 (Japan THK), grating (USA).
• Y unit: motor and driver (Japan Lezi), lead screw (Japan NSK), guide rail 2 (Japan THK), grating 2 (USA).
• Rotating table: motor and drive (Lezi, Japan), rotating shafting
• Z stage: motor and driver (Rakuzi, Japan), lead screw, rising guide mechanism
• Receptacle: 4 inches (can be added by 3 inches, 2 inches, 1 inches, etc.).

(3) Focusing system

• Focal plane optical detection system, CCD, focal plane detection software

(4) Alignment system

• Alignment optical inspection system, CCD, alignment software

(5) Electronic control system

• Mercury lamp power supply and trigger, host control system, software, computer, monitor (19-inch LCD), interface

(6) Pneumatic system

• Solenoid valves, rotary cylinders, pressure reducing valves, pressure gauges, vacuum gauges

(7) Other attachments

• One vacuum pump (oil-free pump).
• One air compressor (silent pump)
• pipeline

5. Delivery: 2 months

6. Quotation: about 650,000 RMB, confirmed or adjusted according to the configuration