1. Technical characteristics

• High-magnification binocular dual-field microscope and 22-inch widescreen LCD display to observe the alignment process at the same time, and provide USB output; It not only satisfies high-precision alignment, but also can be used to detect exposure results, and the exposure results are convenient for storage
• The inverted lighting makes it easier to replace the mercury lamp, and the heat dissipation and light leakage prevention effect is better
• The alignment position and the exposure position work in double stations, and the double stations are automatically switched
• It adopts embedded computer + touch screen operation, which is more convenient and fashionable to operate
• It is very convenient to get on and off the film and plate, with a high degree of automation and easy operation. It is especially suitable for teaching and scientific research in colleges and universities (good reliability, convenient demonstration) and factories (high efficiency).

2. Technical parameters

• Exposure area: 100mm×100mm (upgradable to 6 inches).
• Exposure wavelength: 365nm
• Resolution: ≤1 μm (1.5 μm  thick).
• Alignment accuracy: ±0.6μm
• Microscope scanning table motion range: X: 10mm; Y:10mm
• Mask sizes: 2.5", 3", 4", 5".
• Sample size: diameter Φ15mm-Φ100mm (all kinds of irregular pieces); Thickness 0.1mm--6mm
• Exposure method: timed (countdown mode) and fixed dose
• It has four functions: vacuum contact exposure, hard contact exposure, pressure contact exposure, and proximity exposure
• Illumination non-uniformity: 3% (Φ100mm range).
• Binocular dual-field alignment microscope: both visual alignment through eyepieces, or alignment through CCD+ display, optical synthesis, optical maximum magnification of 400 times, optical + electronic magnification of 800 times; Three pairs of objective lenses: 4x, 10x, 20x; Three pairs of eyepieces: 10x, 16x, 20x
• Exposure alignment is automatically switched between two stations
• Leveling the contact pressure is guaranteed to be repeatable by means of a sensor
• Digitally set alignment gaps and clearances
• It has an interface to the imprint module and also has an interface to the proximity module
• Mask relative to sample movement: X: ±5mm; Y: ±5mm; θ: ±6º
• Maximum coke thickness: 400m (SU8 glue, user provides detection conditions).
• Light source parallelism: 3 º
• Exposure energy density: >25mW/cm2, illumination surface temperature<35 ºC
• Single-layer exposure is done with one click
• Ball air floatation + three-claw leveling is adopted
• Mercury lamp power: 350W (DC, inlet).

3. Dimensions: 1400mm (length), × 900mm (width) × 1500mm (height).

4. Configuration

(1) Exposure head

• Cold-light ellipsoids
• 350W imported DC high-voltage mercury lamp (Osram, Germany).
• XYZ Mercury Lamp Adjustment Table
• Cooling fan
• Optical system: fixed light bar, variable light bar, shutter, collimating mirror 1, collimating mirror 2, fly eye lens group (79 lenses), I-line filter, field mirror, cold light mirror 1, reflector 2

(2) Align the workpiece table

 Lithography machine base

• Station Switcher (Cylinder)
• Mask the overall sports table
• The mask is relative to the motion table
• Turntable
• Sample leveling mechanism, three-point automatic completion
• Sample focusing mechanism, motor automatic adjustment
• Substrate pull-out upper and lower mechanism
• 4 film decks: Φ15mm, Φ40mm, Φ60mm, Φ100mm (can be increased or decreased according to user requirements).
• 4 mask clamps: 2.5 inches, 3 inches, 4 inches, 5 inches (can be increased or decreased according to user requirements).
• Sample pull-out upper and lower mechanism

(3) Align the microscope

• Light source, power supply
• Binocular bin-field alignment with the microscope body
• 3 pairs of eyepieces (10x, 16x, 20x, 6 in total).
• 3 pairs of objective lenses (4x, 10x, 20x, 6 in total).
• CCD alignment system, 22" LCD

(4) Electronic control system

• Mercury lamp trigger power supply (350W DC mercury lamp).
• MCU control system
• control panel
• Control cabinet table

(5) Pneumatic system

• Cylinders, solenoid valves, pressure reducing valves, pneumatic switches, etc
• Solenoid valve actuated
• Pneumatic instrumentation

(6) Other attachments

• One vacuum pump
• One air compressor
• Supporting interface pipes

(7) Technical data

• Use the service manual
• Product inspection certificate

5. Delivery: 1 month

6. Quotation: about 290,000 RMB, confirmed or adjusted according to the configuration