1. Main technical indicators of equipment:

(1) Beam aperture: 650mm×650mm

(2) Effective exposure area: 600mm×600mm

(3) Resolution: ≤3μm

(4) Alignment accuracy: ± 1.5 μm

(5) Alignment microscope center distance: 75mm-600mm adjustable

(6) Mask size: 650mm×650mm

(7) Sample size: Ф300mm, Ф450mm, Ф600mm 300mm×300mm; 450mm×450mm； 600mm×600mm, thickness of 0.2mm~20mm of a variety of specifications;

(8) Light source inhomogeneity: ≥ 95% (Ф600mm).

(9) Mask relative to sample movement stroke: X: ±15mm; Y: ±15mm; Z：15mm θ: ±10º

(10) Exposure surface light intensity: >15mW/cm2 (i, g, h lines).

(11) Mercury lamp power: 2500W (DC).

(12) Exposure setting mode: timing (countdown mode 0.1s-9999.9s, setting accuracy 0.1s).

2. The main components of the technology

The large-area fine rubber mold pattern structure molding machine is mainly composed of: high uniform illumination exposure system, alignment workpiece table system, CCD alignment system, computer control system, pneumatic control system and auxiliary equipment.

The configuration and configuration of each system are as follows:

(1) The highly uniform lighting system includes:

• Cold-light ellipsoids;
• 2500W imported DC high-voltage mercury lamp (Osram, Germany).
• XYZ Mercury Lamp Regulating Table;
• Optical system: ellipsoidal mirror, light bar, shutter, plane cold light mirror 1, plane cold light mirror 2, fly's eye lens group, parabolic cold light mirror;
• cooling fans;
• Circulating water cooling system.

(2) The alignment workpiece table system comprises:

• Mask panel relative to motion table;
• Turning table;
• Sample leveling mechanism, automatic completion;
• Sample focusing mechanism, automatic adjustment;
• 10 film tables: Ф300mm, Ф450mm, Ф600mm and 300mm×300mm; 450mm×450mm； 600mm×600mm；
• 1 mask clamp: 650mm×650mm;
• Pull-out upper and lower piece mechanism.

(3) The CCD alignment system comprises:

• light source, power supply;
• microscope table;
• imaging optical systems (two sets);
• data acquisition card;
• CCD image processing components (two sets).
• (4) The electronic control system includes:
• High-power mercury lamp trigger power supply;
• single-chip microcomputer control system;
• membrane switch panels;
• control cabinet tables;

(5) The pneumatic system includes:

• cylinders, solenoid valves, pressure reducing valves, pneumatic switches, etc.;
• solenoid valve drive parts;
• Pneumatic display instrument.

(6) Other supporting accessories

• One vacuum pump (oil-free pump, SK-65C type);
• One air compressor (silent type, YB-W30 type);
• One water cooler (H35W type);
• Supporting interface pipes

3. Relevant technical information:

• Equipment use and maintenance manual
• Factory inspection certificate.

4. Quotation: about 1.4 million RMB, confirmed or adjusted according to the configuration

5. The delivery time is 6 months