1. Main technical indicators of equipment:

(1) Exposure area: 300mm×300mm;

(2) Resolution: ≤2μm;

(3) Alignment accuracy: ±2μm;

(4) Mask size: 7 inches, 9 inches, 13 inches;

(5) Sample size: 6 inches, 8 inches, 12 inches;

(6) Wafer Chuck surface: anti-light reflection coating;

(7) The overall motion range of the mask pattern: X: 10mm; Y:10mm；

(8) Mask relative to sample movement stroke: X: ±5mm; Y: ±5mm; θ: ±6°；

(9) Mercury lamp power: 1000W (DC);

(10) Exposure energy density: ≥ 10mW/cm2;

(11) Peak exposure wavelength: 365nm;

(12) Parallelism of light source: <2°;

(13) Exposure mode: timing (countdown mode: 0.1s-9999.9s);

(14) Lithography fixture compatibility

2. The main components of the technology

(1) The exposure head system includes:

• Cold-light ellipsoids;
• Germany OSRAM1000W DC high-voltage mercury lamps;
• XYZ Mercury Lamp Regulating Table;
• optical system (cold light ultraviolet plane mirror, shutter, fly eye lens group, cold light ultraviolet parabolic mirror);
• Cooling fan.

(2) The alignment workpiece table system comprises:

• Mask panel relative to motion table;
• (XY), rotating table;
• sample leveling mechanism;
• sample focusing mechanism;
• 3 socket tables: 6 inches, 8 inches, 12 inches;
• 3 mask clamps: 7 inches, 9 inches, 13 inches.

(3) The CCD alignment microscope system comprises:

• 2 4x microscopes;
• 2 sets of lighting sources;
• 2 CCD cameras;
• 22-inch LCD monitor.

(5) Electronic control system:

• Mercury lamp trigger power supply (1000W);
• single-chip microcomputer control system;
• Control cabinet table.

(6) The pneumatic system system includes:

• Cylinders, solenoid valves, pressure reducing valves, pneumatic switches, solenoid valve drives, pneumatic instruments, etc

(7) Other configurations and accessories

• a vacuum pump;
• one air compressor;
• Supporting trachea 10m;

3. Relevant technical information:

• Equipment use and maintenance manual
• Factory inspection certificate.

4. Quotation: about 700,000 RMB, confirmed or adjusted according to the configuration

5. Delivery time: 3 months