1. Main technical indicators of equipment:

(1) Exposure area: 200mm×200mm;

(2) Resolution: ≤2μm;

(3) Alignment accuracy: ±2μm;

(4) Mask size: 5 inches, 7 inches, 9 inches;

(5) Sample size: 4 inches, 6 inches, 8 inches;

(6) Wafer Chuck surface: anti-light reflection coating;

(7) The overall motion range of the mask pattern: X: 10mm; Y:10mm；

(8) Mask relative to sample movement stroke: X: ±5mm; Y: ±5mm; θ: ±6°；

(9) Mercury lamp power: 1000W (DC);

(10) Exposure energy density: ≥ 15mW/cm2 ;

(11) Peak exposure wavelength: 365nm;

(12) Exposure mode: timing (countdown mode: 0.1s-999.9s);

(13) Leveling the contact pressure is guaranteed to be repeated through the sensor

(14) Digitally set the alignment gap and exposure gap

(15) It has an imprint module interface, and also has a proximity module interface

2. The main components of the technology

(1) The exposure head system includes:

• Cold-light ellipsoids;
• Germany OSRAM1000W DC high-voltage mercury lamps;
• XYZ Mercury Lamp Regulating Table;
• optical system (cold light ultraviolet plane mirror, shutter, fly eye lens group, cold light ultraviolet parabolic mirror);
• Cooling fan.

(2) The alignment workpiece table system comprises:

• Mask panel relative to motion table;
• (XY), rotating table;
• sample leveling mechanism;
• sample focusing mechanism;
• 3 film decks: 4 inches, 6 inches, 8 inches;
• 3 mask clamps: 5 inches, 7 inches, 9 inches.

(3) The CCD alignment microscope system comprises:

• 2 4x microscopes;
• 2 sets of lighting sources;
• 2 CCD cameras;
• 22-inch LCD monitor.

(5) Electronic control system:

• Mercury lamp trigger power supply (1000W);
• single-chip microcomputer control system;
• Control cabinet table.

(6) The pneumatic system system includes:

• Cylinders, solenoid valves, pressure reducing valves, pneumatic switches, solenoid valve drives, pneumatic instruments, etc

(7) Other configurations and accessories

• a vacuum pump;
• one air compressor;
• Supporting trachea 10m;

3. Relevant technical information:

• Equipment use and maintenance manual
• Factory inspection certificate.

4. Quotation: about 570,000 RMB, confirmed or adjusted according to the configuration

5. Delivery time 2 months