1. Technical parameters

• Exposure area: 4 inches
• Exposure wavelength: 365nm
• Resolution: 1.5 μm (2 μm  thick).
• Alignment accuracy: ±1μm
• Overall motion range of the mask: X: 15mm; Y:15mm
• Mask sizes: 2.5", 3", 4", 5".
• Sample size: diameter Φ15mm-- Φ100mm
• Thickness: 0.1mm--6mm (expandable to 15mm)
• Exposure method: timed (countdown mode) and fixed dose
• Illumination non-uniformity: 5% (Φ100mm range).
• Binocular dual-field alignment microscope: both visual alignment through eyepieces, or alignment through CCD+ display, optical synthesis, optical maximum magnification of 400 times, optical + electronic magnification of 800 times; Three pairs of objective lenses: 4x, 10x, 20x; Three pairs of eyepieces: 10x, 16x, 20x
• Mask motion stroke relative to the analiform:
• X: ±5mm; Y: ±5mm; Thema: ±6 degrees
• Mercury lamp power: 200W (DC).
• Exposure energy density: 6mW/cm2

2. Dimensions: 650mm (length), × 600mm (width) ×900mm (height).

3. Configuration

(1) Exposure head

• 200W imported DC high-voltage mercury lamp (Osram, Germany).
• XYZ Mercury Lamp Adjustment Table
• Optics
• Cooling fan

(2) Align the workpiece table

• Mask the overall sports table
• The mask is relative to the motion table
• Turntable
• Sample leveling mechanism, manual
• Sample focusing mechanism, manual
• 3 substrate tables (Φ50mm, Ø75mm, Ø100mm).
• 4 mask clamps (2.5", 3", 4", 5".
• Mask pull-out upper and lower mechanism

(3) Align the microscope

• Light source (2 items), power supply
• Binocular bin-field alignment with the microscope body
• 3 pairs of eyepieces (10x, 16x, 20x, 6 in total).
•  3 pairs of objective lenses (4x, 10x, 20x, 6 in total).
• CCD (Taiwan).
• 21-inch LCD

(4) Electronic control system

• Mercury lamp trigger power supply (200W DC mercury lamp).
• MCU control system
• Control the chassis

(5) Pneumatic system

• Cylinders, solenoid valves, pressure reducing valves, pneumatic switches, etc
• Solenoid valve actuated
• Pneumatic instrumentation

(6) Other attachments

• One vacuum pump
• pipeline

(7) Technical data

• Use the service manual
• Microscope instruction manual

4. Delivery time: 1 month

5. Quotation: about 150,000 RMB, confirmed or adjusted according to the configuration