1. Technical parameters

• Exposure area: 150mmX150mm
• Exposure wavelength: 365nm
• Resolution: 0.8-1 μm (  2 μm  thick).
• Alignment accuracy: ±0.6μm
• Overall motion range of the mask: X: 15mm; Y:15mm
• Mask sizes: 3 inches, 4 inches, 5 inches, 7 inches
• Sample size: diameter Φ15mm-- Φ150mm (all kinds of irregular pieces); Thickness 0.1mm--5mm (expandable to 15mm).
• Exposure mode: timer (countdown mode), 0.1s-9999s
• It has four functions: vacuum contact exposure, hard contact exposure, pressure contact exposure, and proximity exposure
• Illumination non-uniformity: 2.5% (Φ100mm range); 5% (Φ150mm range).
• Binocular dual-field alignment microscope: both visual alignment through eyepieces, or alignment through CCD+ display, optical synthesis, optical maximum magnification of 400 times, optical + electronic magnification of 800 times; Three pairs of objective lenses: 4x, 10x, 20x; Three pairs of eyepieces: 10x, 16x, 20x
• Leveling the contact pressure is guaranteed to be repeatable by means of a sensor
• Digitally set alignment gap and exposure gap
• It has an interface to the imprint module and also has an interface to the proximity module
• Mask relative to sample movement: X: ±5mm; Y: ±5mm; Thema: ±6 degrees
• Maximum glue thickness: 500μm (SU8 glue).
• Light source parallelism: 1.2°
• Exposure energy density: >18mW/cm2
• Cooling method: circulating water + air cooling
• Exposure surface temperature: <30°C
• Mercury lamp power: 1000W (DC, imported

2. Dimensions: 1400mm (length), × 1200mm (width) × 1950mm (height).

3. Configuration

(1) Exposure head

• Cold-light ellipsoids
• 1000W imported DC high voltage mercury lamp (Osram, Germany, long life type).
• XYZ Mercury Lamp Adjustment Table
• Cooling fan
• Optical system: fixed light bar, variable light bar, shutter, collimating mirror 1, collimating mirror 2, fly eye lens group (109 lenses), i-line filter, field mirror 1, field mirror 2, cold light mirror 1, reflector 2
• Circulating water cooling system

(2) Align the workpiece table

• Mask the overall sports table
• The mask is relative to the motion table
• Turntable
• Sample leveling mechanism, automatic
• Sample focusing mechanism, automatic adjustment
• 4 receptacles (2", 3", 4", 6".
• 4 mask clamps (3", 4", 5", 7".
• Substrate pull-out upper and lower piece mechanism

(3) Align the microscope

• Light source (2 items), power supply
• Binocular bin-field alignment with the microscope body
• 3 pairs of eyepieces (10x, 16x, 20x, 6 in total).
• 3 pairs of objective lenses (4x, 10x, 20x, 6 in total).

(4) CCD alignment system (optional).

• Light source (3 accessories), power supply
• Imaging Optical System (2 sets)
• Data Acquisition Cards
• Three-dimensional workpiece table (2 sets)
• CCD (2).

(5) Electronic control system

• Mercury lamp trigger power supply (1000W DC mercury lamp).
• MCU control system
• Control cabinet table
• Computer systems and LCD monitors

(6) Pneumatic system

• Cylinders, solenoid valves, pressure reducing valves, pneumatic switches, etc
• Solenoid valve actuated
• Pneumatic instrumentation

(7) Other attachments

• One vacuum pump (oil-free pump)
• One air compressor (silent pump)
• pipeline

(8) Technical data

• Use the service manual
• Microscope instruction manual

4. Quotation: about 420,000 RMB, confirmed or adjusted according to the configuration

5. Delivery time: 2 months