1. Technical parameters

• Exposure area: 4 inches
• Exposure wavelength: 365nm: 25mW/cm²; 405nm：20-40mW/cm²
• Resolution: 1 μm
• Alignment accuracy: ±2 μm (double-sided, sheet thickness 0.8 mm), ± 0.8 μm (single-sided).
• Mask sizes: 3 inches, 4 inches, 5 inches
• Sample sizes: 2", 3", 4"; Thickness 0.1mm--6mm
• Exposure method: timed (countdown mode) and fixed dose
• Leveling the contact pressure is guaranteed to be repeatable by means of a sensor
• Digitally set alignment gap and exposure gap
• It has an interface to the imprint module and also has an interface to the proximity module
• The front alignment adopts binocular dual-field alignment microscope: it can be visually aligned through the eyepiece, or it can be aligned by CCD+ display, optical synthesis, the maximum optical magnification is 400 times, and the optical + electronic magnification is 800 times; Three pairs of objective lenses: 4x, 10x, 20x; Three pairs of eyepieces: 10x, 16x, 20x
• Bottom surface alignment: double microscope objective lens + CCD + acquisition card + computer combining, objective lens wheelbase range 10mm-148mm
• Illumination non-uniformity: 2.5% (Φ100mm range).
• Mask relative to sample movement: X: ±5mm; Y: ±5mm; Thema: ±6 degrees
• Maximum glue thickness: 600 μm (SU8 glue, user-provided detection conditions).
• Light source parallelism: 2°
• It has a circulating water cooling system
• Mercury lamp power: 1000W (DC, import).

2. Dimensions: 1400mm (length), × 1200mm (width) ×2000mm (height).

3. Configuration

(1) Exposure head

• Cold-light ellipsoids
• 1000 W imported DC high-voltage mercury lamp (OSRAM, Germany, long life type);
• XYZ Mercury Lamp Adjustment Table
• Cooling fan
• Optical system: fixed light bar, variable light bar, shutter, collimating mirror 1, collimating mirror 2, fly's eye lens set (109 lenses), I-line filter, field mirror, cold light mirror 1, reflector 2

(2) Align the workpiece table

• The mask is relative to the motion table
• Turntable
• Sample leveling mechanism, automatic
• Sample focusing mechanism
• 3 socket tables (3 inches, 4 inches, 5 inches).
• 3 mask clamps (2 inches, 3 inches, 4 inches).
• Mask pull-out upper and lower mechanism

(3) Alignment microscope (can choose with CCD type, eyepiece and monitor can be observed at the same time).

• Light source (2 items), power supply
• Binocular bin-field alignment with the microscope body
• 3 pairs of eyepieces (10x, 16x, 20x, 6 in total).
•  3 pairs of objective lenses (4x, 10x, 20x, 6 in total).
• CCD optical system

(4) Bottom CCD alignment system

• Light source (2 equipment), power supply
• Imaging optics (2 sets).
• Dual-channel data acquisition card
• CCD (two sets).

(5) Electronic control system

• Mercury lamp trigger power supply (1000W DC mercury lamp).
• MCU control system
• Control cabinet table
• Computer system (monitor with 21-inch widescreen LCD)

(6) Pneumatic system

• Cylinders, solenoid valves, pressure reducing valves, pneumatic switches, etc
• Solenoid valve actuated
• Pneumatic instrumentation

(7) Other attachments

• One oil-free silent vacuum pump
• One oil-free silent air compressor
• Constant temperature circulating water cooling system
• pipeline

(8) Technical data

• Use the service manual

4. Lead time: 1-2 months

5. Quotation: about 420,000 RMB, confirmed or adjusted according to the configuration